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发明名称
载台装置、图案形成装置、曝光装置、载台驱动方法、曝光方法、以及元件制造方法
摘要
申请公布号
TWI437373
申请公布日期
2014.05.11
申请号
TW098114316
申请日期
2009.04.30
申请人
尼康股份有限公司 日本
发明人
柴崎佑一
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
桂齐恒 台北市中山区长安东路2段112号9楼;阎启泰 台北市中山区长安东路2段112号9楼
主权项
地址
日本
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