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发明名称
基板清洗制程
摘要
申请公布号
TWI437627
申请公布日期
2014.05.11
申请号
TW100115842
申请日期
2011.05.05
申请人
隆达电子股份有限公司 新竹市科学园区工业东三路3号
发明人
柯正良;赵启仲;何孝恒
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
祁明辉 台北市信义区忠孝东路5段510号22楼之2;林素华 台北市信义区忠孝东路5段510号22楼之2;涂绮玲 台北市信义区忠孝东路5段510号22楼之2
主权项
地址
新竹市科学园区工业东三路3号
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