曝光能量资料产生装置、曝光能量资料产生方法及半导体装置之制造方法,申请号TW100129622-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	曝光能量资料产生装置、曝光能量资料产生方法及半导体装置之制造方法
摘要
申请公布号	TWI437380	申请公布日期	2014.05.11
申请号	TW100129622	申请日期	2011.08.18
申请人	东芝股份有限公司日本	发明人	冈本阳介;小池贵
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人	陈长文台北市松山区敦化北路201号7楼
主权项
地址	日本

您可能感兴趣的专利

Synthesizing graphene comprises producing graphene by linking aromatic compounds using lithium and halogen

Distribution system for flyer, has electronic network, at which multiple electronic terminals are connected, where database is integrated in electronic network, and access unit is provided to database for accessing data

Heating device, which is arranged individually or in combination with other heating devices during heating, for heating of bands wires, pipes, other material or workpieces

Lift for airplane, has capacitive sensor segments that are provided with pressure-sensitive device and capacitive sensor layers and formed with foam layer as dielectric with specific strain hardness and pressure

Device for inlaying in e.g. frame of water bed for use with mattress as couch surface for person with spine diseases, has main plates, head plate with head end-side end, and leg plates with foot end lowered in couch profile

Erdnagelösenstrandbadetuch

Simulation einer Berührungstextur auf der Anzeige einer Mobilfunkeinheit mithilfe von Vibration

Elektrische Akkumulatorvorrichtung mit elastischen Elementen

Shot Peening Flow Rate Control

CHEESE-LIKE FOOD PRODUCT

ENDOVASCULAR CATHETERS FOR TRANS-SUPERFICIAL TEMPORAL ARTERY TRANSMURAL CAROTID BODY MODULATION

Cyclin D1 GENE EXPRESSION INHIBITOR AND ANTICANCER DRUG

ORGANIC LIGHT-EMITTING MATERIAL AND ORGANIC LIGHT-EMITTING ELEMENT

CAR PARKING APPARATUS USING COMB TEETH TO BEAR AND STORE/RETRIEVE VEHICLES

MANUFACTURING METHOD FOR OPTICAL SHEET AND MANUFACTURING METHOD FOR PLANAR LIGHT SOURCE DEVICE

PROTEÍNAS DE FUSIÓN PARA TRATAR TRASTORNOS METABÓLICOS

INTERPOLATION FILTERING METHOD AND INTERPOLATION FILTER

METHOD AND APPARATUS FOR DETERMINING ONE OR MORE GROUP DECISION POINTS DURING A GROUP COMMUNICATION SESSION

ULTRASONIC DIAGNOSTIC DEVICE AND METHOD FOR CONTROLLING ULTRASONIC DIAGNOSTIC DEVICE