发明名称 |
MICROMECHANICAL ACCELEROMETER |
摘要 |
FIELD: measurement equipment.SUBSTANCE: micromechanical accelerometer comprises a sensitive element, made of single-crystal silicon of low conductivity, an external frame with a pendulum fixed on it with the help of resilient torsions. The external frame has alternating width. In its narrow part there are U-shaped loops facing outside. The sites of fixation to glass pads on the external frame are arranged strictly on longitudinal and transverse axes of a sensitive element. In the micromechanical accelerometer there are round glass pads. This simplifies assembly and reduces labour intensiveness of the item.EFFECT: increased accuracy with simultaneous reduction of labour intensiveness without change in mass and dimension parameters.2 dwg |
申请公布号 |
RU2515378(C1) |
申请公布日期 |
2014.05.10 |
申请号 |
RU20120149069 |
申请日期 |
2012.11.20 |
申请人 |
FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "NATSIONAL'NYJ ISSLEDOVATEL'SKIJ UNIVERSITET "MIEHT" (MIEHT) |
发明人 |
CHAPLYGIN JURIJ ALEKSANDROVICH;TIMOSHENKOV SERGEJ PETROVICH;SHILOV VALERIJ FEDOROVICH;MIRONOV SERGEJ GENNAD'EVICH;KIRGIZOV SERGEJ VIKTOROVICH;GLAZKOV OLEG NIKOLAEVICH;ANCHUTIN STEPAN ALEKSANDROVICH;KOCHURINA ELENA SERGEEVNA;TIMOSHENKOV ALEKSEJ SERGEEVICH |
分类号 |
G01P15/00 |
主分类号 |
G01P15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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