| 摘要 |
FIELD: machine building.SUBSTANCE: flow regulator (10) comprises flow rate transducer (14) with sensitive element (12) to measure flow rate and flow rate control unit (18) connected to said flow rate transducer (14) to adjust said flow rate. Said sensitive element (12) is built around sensor (38) consisting of flow thermal sensor using the MEMS technology. Flow rate measured by said second (38) is output to control unit (24). Besides, air pressure in feed chamber (84) of flow rate control unit (18) is changed over by electromagnetic feed valve (92) and electromagnetic discharge valve (94). Control valve (58) opens and closes proceeding from feed air pressure.EFFECT: power savings, lower pressure for control over flow rate, fast operation.8 cl, 3 dwg |
