发明名称 METHOD AND APPARATUS FOR NEUTRON DOPING OF SUBSTANCE
摘要 FIELD: chemistry.SUBSTANCE: method for neutron doping of a substance involves slowing down fast source neutrons with a retarder substance, forming a stream of slow neutrons in a selected region and irradiating the substance to be doped with the slow neutrons. During the slowing down process, the fast source neutrons are separated according to propagation angles thereof; streams thereof moving a direction selected by the structure of the retarder substance are selected; streams selected by the structure are summed up, formed into a narrow band and directed onto the substance to be doped, which is controllably moved in the focal region of the neutron streams.EFFECT: high efficiency of the doping process and forming regions with high degree of doping in given areas of the doped substance.5 cl, 3 dwg, 3 ex
申请公布号 RU2514943(C1) 申请公布日期 2014.05.10
申请号 RU20120156229 申请日期 2012.12.25
申请人 PETROV GEORGIJ NIKOLAEVICH;DROBYSHEVSKIJ JURIJ VASIL'EVICH 发明人 PETROV GEORGIJ NIKOLAEVICH;PROKHOROV ALEKSANDR KIRILLOVICH;GUSHCHIN VITALIJ VENIAMINOVICH;DROBYSHEVSKIJ JURIJ VASIL'EVICH;STOLBOV SERGEJ NIKOLAEVICH;NEKRASOV SERGEJ ALEKSANDROVICH
分类号 C30B31/20;G21G1/06;H01L21/263 主分类号 C30B31/20
代理机构 代理人
主权项
地址