发明名称 |
METHOD AND APPARATUS FOR NEUTRON DOPING OF SUBSTANCE |
摘要 |
FIELD: chemistry.SUBSTANCE: method for neutron doping of a substance involves slowing down fast source neutrons with a retarder substance, forming a stream of slow neutrons in a selected region and irradiating the substance to be doped with the slow neutrons. During the slowing down process, the fast source neutrons are separated according to propagation angles thereof; streams thereof moving a direction selected by the structure of the retarder substance are selected; streams selected by the structure are summed up, formed into a narrow band and directed onto the substance to be doped, which is controllably moved in the focal region of the neutron streams.EFFECT: high efficiency of the doping process and forming regions with high degree of doping in given areas of the doped substance.5 cl, 3 dwg, 3 ex |
申请公布号 |
RU2514943(C1) |
申请公布日期 |
2014.05.10 |
申请号 |
RU20120156229 |
申请日期 |
2012.12.25 |
申请人 |
PETROV GEORGIJ NIKOLAEVICH;DROBYSHEVSKIJ JURIJ VASIL'EVICH |
发明人 |
PETROV GEORGIJ NIKOLAEVICH;PROKHOROV ALEKSANDR KIRILLOVICH;GUSHCHIN VITALIJ VENIAMINOVICH;DROBYSHEVSKIJ JURIJ VASIL'EVICH;STOLBOV SERGEJ NIKOLAEVICH;NEKRASOV SERGEJ ALEKSANDROVICH |
分类号 |
C30B31/20;G21G1/06;H01L21/263 |
主分类号 |
C30B31/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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