发明名称 EVAPORATION SOURCE
摘要 An embodiment of the present invention relates to an evaporation source of an evaporation apparatus, wherein the evaporation source includes a crucible in which a flange unit is formed; a heating wire for supporting the flange unit and heating up the crucible; and a reflector which is arranged on the outside of the heating wire to cover the heating wire and has multiple opening units to expose a part of the flange unit.
申请公布号 KR20140055768(A) 申请公布日期 2014.05.09
申请号 KR20120123053 申请日期 2012.11.01
申请人 SUNIC SYSTEM. LTD. 发明人 KIM, HAK SOO
分类号 C23C14/24;C23C14/26 主分类号 C23C14/24
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