发明名称 EPITAXIAL WAFER AND METHOD FOR FABRICATING THE SAME
摘要 Disclosed are an epitaxial wafer which includes: an epitaxial structure with a substrate; a first epitaxial layer formed on the substrate; a second epitaxial layer formed on the first epitaxial layer; and a third epitaxial layer formed on the second epitaxial layer. The epitaxial structure is doped with an n-type or a p-type. The doping concentration for a boundary surface between the first epitaxial layer and the second epitaxial layer is different from the doping concentration for a boundary between the second epitaxial layer and the third epitaxial layer, and a method for fabricating the same.
申请公布号 KR20140055337(A) 申请公布日期 2014.05.09
申请号 KR20120122006 申请日期 2012.10.31
申请人 LG INNOTEK CO., LTD. 发明人 KANG, SEOK MIN
分类号 H01L21/20 主分类号 H01L21/20
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