发明名称 |
SYSTEMS HAVING MULTI-LINKAGE ROBOTS AND METHODS TO CORRECT POSITIONAL AND ROTATIONAL ALIGNMENT IN MULTI-LINKAGE ROBOTS |
摘要 |
<p>Methods of correction of rotational and linear misalignment in multi-link robots are provided. The method allows for precise orientation of an end effector to put or pick substrates at a target destination by correcting for both positional and rotational orientation errors. The method rotates a boom linkage to a position adjacent to the target destination, corrects for linear and rotational error by rotating a boom linkage as well as an upper arm link as well as extending or retracting a wrist member. Systems including long boom linkages are disclosed. Numerous other aspects are provided.</p> |
申请公布号 |
KR20140056328(A) |
申请公布日期 |
2014.05.09 |
申请号 |
KR20147006115 |
申请日期 |
2012.07.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
COX DAMON KEITH;KREMERMAN IZYA |
分类号 |
H01L21/677;B25J9/06;B25J13/00;B65G49/07;H01L21/68 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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