摘要 |
An X-ray generator which makes an electron beam collide with a target and generates an X-ray, includes a column which has a beam transmission part for transmitting the electron beam in a target direction, a magnetic lens which surrounds the beam transmission part for controlling and condensing the electron beam, and a housing part which has the beam transmission part which is penetrably inserted into the column and has a cooling chamber which is formed in the magnetic lens. A cooling fluid which directly touches the magnetic lens circulates around the cooling chamber. |