发明名称 LIGHTNING DEVICE AND EXPOSURE APPARATUS HAVING THEREOF
摘要 <p>The present invention relates to an illuminator with a high collection efficiency capable of preventing faulty light sources. According to the present invention, the illuminator comprises: a fixed plate; a plurality of light emitting diodes arranged on the front of the fixed plate; a plurality of substrates where each light emitting diode is mounted and equipped separately from the neighboring light emitting diodes; a condensing lens collecting light emitted from the light emitting diodes; a plurality of light emitting units arranged between the light emitting diodes and the condensing lens, consisting of an absorbing film preventing a diffused reflection, assembled separately to the fixed plate, and absorbing the emitted light either reflected from the condensing lens or directed toward the area out of the condensing lens; an illumination intensity equalization unit placed on the front of the light emitting units which equalizes the illumination intensity of the light emitted from the light emitting units; a parallel ray conversion unit which emits light with the illumination intensity equalized in parallel and in a single direction; and an exposing stage consisting of a mask placed within the area where the light emitted in parallel in a single direction enters.</p>
申请公布号 KR20140055605(A) 申请公布日期 2014.05.09
申请号 KR20120122696 申请日期 2012.10.31
申请人 LG DISPLAY CO., LTD. 发明人 HONG, SEUNG HO
分类号 G03F7/20;G02F1/13;H01L21/027 主分类号 G03F7/20
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