SENSOR AND MANUFACTURING METHOD FOR SENSOR THEREOF

摘要

The present invention relates to a sensor and a manufacturing method thereof. The manufacturing method of the senor includes a step for forming a first photoresist electrode with photoresist being exposed and hardened on the upper side of a first electrode region on a substrate; a step for forming a pair of second photoresist electrodes with photoresist being exposed and hardened on a pair of second electrode regions separated from each other around the first photoresist electrode; a step for locating a third photomask with multiple transmission parts arranged on the photoresist between the second photoresist electrodes and forming a membrane structure connected with the second photoresist electrodes by exposing and hardening the third photomask by the diffraction of ultraviolet rays; a step for developing the photoresist in the remaining part except for the parts exposed in the third step; and a step for pyrolyzing and converting the first and the second photoresist electrodes and the membrane structure into first and second carbon electrodes and a carbon membrane structure, thereby reducing process costs, improving sensitivity by improving the efficiency of repetitive oxidation and reduction, and manufacturing a nanostructure with low costs without high cost nanoprocess devices.