| 摘要 |
Provided is a method for fabricating a substrate, capable of forming a thin film by taking into consideration of the deformation of the substrate while preventing increase in time occupied by a device and in costs through image data correction. Compressed data, in which image data in a raster format to define the shape of a thin film to be formed on the substrate is compressed, is prepared. The deformation of the substrate in a surface direction is measured. Pixels are inserted into or removed from the compressed data based on the measured deformation without changing the compressed format of the data, thereby generating deformed correction data. The thin film is formed on the substrate based on the generated deformed correction data. |
