| 摘要 |
PROBLEM TO BE SOLVED: To improve load resistance of a photoelectric conversion panel.SOLUTION: A photoelectric conversion panel 21, a reinforcement substrate 22, and a scintillator 20 are housed in a housing 14 of a monocoque structure. The photoelectric conversion panel 21 has a plurality of pixels for photoelectric conversion arranged on a glass-made insulation substrate 30 of 0.5 mm or less in thickness. The reinforcement substrate 22 is stuck on an X-ray incidence side of the photoelectric conversion panel 21 via a first adhesion layer 22a. An X-ray incidence side of the reinforcement substrate 22 is stuck on the housing 14 via a first adhesion layer 22b. The scintillator 20 is vapor-deposited on a surface 21a of the photoelectric conversion panel 21 on the opposite side from the X-ray incidence side. The scintillator 20 has a plurality of columnar crystals 20a and a non-columnar crystal layer 20b. The non-columnar crystal layer 20b is in contact with the surface 21a of the photoelectric conversion panel 21. |
