| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure for preventing crack or damage due to application of a stress to a discharge container by a movement restriction body when removing a lamp, in an excimer light irradiation device in which an excimer lamp including an ultraviolet reflection film formed on the inner surface of the discharge container is held by lamp holders, and the movement restriction body for limiting warpage of the discharge container is provided in contact with the surface of the discharge container.SOLUTION: In at least one of lamp holders, an engaging groove engaging with a support pin provided on the base at the end of a discharge container is formed. The engaging groove consists of a vertical guide opening to the lower end of the lamp holder, and a horizontal guide continuous to the vertical guide. The lamp holder is provided with a positioning member slidably up and down, and a positioning groove in the vertical direction opening to the lower end is formed in the positioning member. |
