发明名称 SEMICONDUCTOR WAFERS RECRYSTALLIZED IN A PARTIALLY SURROUNDING THIN FILM CAPSULE
摘要 An original wafer, typically silicon, has the form of a desired end PV wafer. The original may be made by rapid solidification or CVD. It has small grains. It is encapsulated in a clean thin film, which contains and protects the silicon when recrystallized to create a larger grain structure. The capsule can be made by heating a wafer in the presence of oxygen, or steam, resulting in silicon dioxide on the outer surface, typically 1-2 microns. At least one support element supports the wafer at the time the capsule is provided and blocks only minimal surface area from contact with the film forming atmosphere. There may be a plurality of support elements, or a surface may provide such support. The capsule contains the molten material during recrystallization, and protects against impurities. Recrystallization may be in air. After recrystallization, the capsule is removed.
申请公布号 US2014124963(A1) 申请公布日期 2014.05.08
申请号 US201414155546 申请日期 2014.01.15
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 SACHS EMANUEL M;SERDY JAMES G.;HANTSOO EERIK T.
分类号 C30B13/00;H01L23/31;H01L29/04 主分类号 C30B13/00
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