LASER CHAMBER AND DISCHARGE-EXCITED GAS LASER DEVICE

摘要

The purpose of the present invention is to minimize fluorine gas-induced corrosion of a touchdown bearing used in a laser chamber, as well as to minimize wear of the touchdown bearing. The laser chamber houses a pair of discharge electrodes and a fan for gas circulation, and is provided with a magnetic bearing capable of contactless support of the shaft of the fan, and a touchdown bearing that functions as a bearing at times when the magnetic bearing is out of control. As a solid lubricant for the touchdown bearing, there may be employed at least one of an Au plating layer, an Ni-containing plating layer, and a Cu plating layer.