发明名称 |
SUBSTRATE PROCESSING DEVICE |
摘要 |
<p>A substrate processing device comprises: a storage tank for storing a phosphoric acid aqueous solution; a substrate support means for supporting a substrate immersed in the phosphoric acid aqueous solution horizontally in the storage tank; and a heating means, having a heater arranged opposite the substrate which is supported by the substrate support means, for heating the substrate with radiant heat or transmitted heat from the heater.</p> |
申请公布号 |
WO2014069079(A1) |
申请公布日期 |
2014.05.08 |
申请号 |
WO2013JP72438 |
申请日期 |
2013.08.22 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
OTA, TAKASHI;HASHIZUME, AKIO;HINODE, TAIKI |
分类号 |
H01L21/306;H01L21/304 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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