发明名称 |
DEPOSITION AMOUNT MEASURING APPARATUS, DEPOSITING APPARATUS INCLUDING THE SAME, AND METHOD FOR MANUFACTURING LIGHT EMITTING DISPLAY |
摘要 |
A deposition amount measuring apparatus includes a plate-shaped body having a rotating shaft, a plurality of deposition amount sensors along side surfaces of the body, the deposition amount sensors being configured to measure an amount of deposition material, and a housing surrounding the body, the housing including an inflow port that exposes one of the deposition amount sensors. |
申请公布号 |
US2014127833(A1) |
申请公布日期 |
2014.05.08 |
申请号 |
US201313889756 |
申请日期 |
2013.05.08 |
申请人 |
KIM KYUNG-SOO;JEONG SEONG-HO;SONG HYUN-KEUN;KANG EU-GENE |
发明人 |
KIM KYUNG-SOO;JEONG SEONG-HO;SONG HYUN-KEUN;KANG EU-GENE |
分类号 |
H01L21/66;G01N33/00;H01L51/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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