发明名称 DEPOSITION AMOUNT MEASURING APPARATUS, DEPOSITING APPARATUS INCLUDING THE SAME, AND METHOD FOR MANUFACTURING LIGHT EMITTING DISPLAY
摘要 A deposition amount measuring apparatus includes a plate-shaped body having a rotating shaft, a plurality of deposition amount sensors along side surfaces of the body, the deposition amount sensors being configured to measure an amount of deposition material, and a housing surrounding the body, the housing including an inflow port that exposes one of the deposition amount sensors.
申请公布号 US2014127833(A1) 申请公布日期 2014.05.08
申请号 US201313889756 申请日期 2013.05.08
申请人 KIM KYUNG-SOO;JEONG SEONG-HO;SONG HYUN-KEUN;KANG EU-GENE 发明人 KIM KYUNG-SOO;JEONG SEONG-HO;SONG HYUN-KEUN;KANG EU-GENE
分类号 H01L21/66;G01N33/00;H01L51/00 主分类号 H01L21/66
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