METHOD OF DETERMINING POSITION OF CHIP ARRANGEMENT REGION, PROGRAM AND PROCESSING APPARATUS, EXPOSURE DEVICE AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To maximize the shortest distance between the outer periphery of an effective region and a chip arrangement region, even if the chips are not arranged in a grid.SOLUTION: A processing apparatus determines the position for the effective region on a substrate of a chip arrangement region where the mutual arrangement relationship of a plurality of chips of rectangular shape is preset. Outer periphery of the effective region is defined by a first circle. The method includes a step for determining a second circle having a smallest radius including the chip arrangement region, and a step for determining the position of the chip arrangement region for the effective region so that the center of the second circle matches the center of the first circle.