发明名称 IRRADIATION SYSTEM, DRAWING DEVICE AND METHOD OF MANUFACTURING ARTICLE
摘要 <p>PROBLEM TO BE SOLVED: To provide an effect advantageous for reducing the intensity difference of a plurality of charged particle beams in an irradiation system.SOLUTION: An irradiation system for irradiating an object with a plurality of charged particle beams includes an emission unit for emitting a charged particle beam radially with a first axis as a central axis, and a lens array including a plurality of lens and dividing a charged particle beam emitted from the emission unit into a plurality of charged particle beams corresponding to the plurality of lens, respectively. The plurality of lens are arranged so that the crossover of an emission unit on the main axis of a charged particle beam passing through each lens and the distance to a lens corresponding to the crossover are constant over the plurality of lens.</p>
申请公布号 JP2014082171(A) 申请公布日期 2014.05.08
申请号 JP20120231216 申请日期 2012.10.18
申请人 CANON INC 发明人 IMAOKA NOBURO
分类号 H01J37/153;G03F7/20;H01J37/12;H01J37/21;H01J37/305;H01L21/027 主分类号 H01J37/153
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