| 摘要 |
PROBLEM TO BE SOLVED: To establish a technique for reducing variation of thickness of a transparent conductive film to be formed in depositing the transparent conductive film on a glass article by applying a thermal CVD method to the glass article under a heating condition.SOLUTION: A jig 50 for depositing a film on a glass article is used in chemical vapor deposition (CVD) by blowing raw material gas to a plate-like glass article 1 under a heating condition. The jig comprises a location part 10 for locating the glass article 1, and a contact member 20 in contact with the glass article 1. The contact member 20 is arranged in contact with an edge 1a of the glass article 1. The contact member 20 has almost the same thickness as the glass article 1, is made of the same material as the glass article 1, and is constituted by plural dividable plate materials 20a-20d. |
