发明名称 |
SHAPE MEASURING INSTRUMENT, SHAPE MEASURING INSTRUMENT ADJUSTMENT METHOD AND SHAPE MEASUREMENT METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring instrument, a shape measuring instrument adjustment method and a shape measurement method that can improve operation efficiency by simplifying workpiece position adjustment.SOLUTION: A shape measuring instrument 1 performing a rotation copying measurement to a rotor shape workpiece and a linear copying measurement thereto comprises: a rotary table 10 that has the workpiece loaded and rotates around a prescribed rotary axial line; a rotation copying measurement section 20 that measures a displacement of a surface of the workpiece loaded on the rotary table 10; a linear copying measurement section 30 that measures a contour shape of the surface of the workpiece loaded on the rotary table 10 along a prescribed measurement axial line; and a movement mechanism 40 that causes the linear copying measurement section 30 and the rotary table 10 to be relatively moved in a direction crossing the measurement axial line. The linear copying measurement section 30 and the rotary table 10 are adjusted to a relative position where the measurement axial line passes the rotation axial line. |
申请公布号 |
JP2014081342(A) |
申请公布日期 |
2014.05.08 |
申请号 |
JP20120231225 |
申请日期 |
2012.10.18 |
申请人 |
MITSUTOYO CORP |
发明人 |
SHINDO HIDEKI;OMORI YOSHIYUKI |
分类号 |
G01B5/00;G01B5/20;G01B21/20 |
主分类号 |
G01B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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