| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently convert, as a portion of a raw ingredient, a polymer separated at a chlorinating step into trichlorosilane while preventing pipeline congestions.SOLUTION: In a method for manufacturing trichlorosilane where not only a polymer including high-boiling-point chlorosilanes but also hydrogen chloride are introduced into a decomposition furnace and reacted at a high temperature so as to decompose the polymer and manufacture trichlorosilane, the polymer and hydrogen chloride are fed into and reacted within the interior of the decomposition furnace being heated, and the polymer and hydrogen chloride are also merged within a high-temperature zone of at least 200°C.</p> |
