| 摘要 |
[Problem] To provide a target assembly and a production method therefor, whereby an alloy target or a compound target may be stably produced using a cold spray method. [Solution] In the method for producing a target assembly according to one embodiment of the present invention, a powder mixture of a first powder comprising a metal element and a second powder comprising an alloy or compound having the metal element as the primary component is prepared, and the powder mixture is used as a raw material in a cold spray method in order to form a target layer comprising the metal element alloy or compound on the surface of a substrate. This makes it possible to stably produce an alloy target or a compound target using a cold spray method. |
