IRRADIATION DEVICE, DRAWING DEVICE, AND METHOD FOR MANUFACTURING ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a drawing device advantageous for aligning a charged particle optical system including a charge particle source.SOLUTION: There is provided an irradiation device which irradiates an object with a charged particle beam and comprises: a first charged particle optical system including a charged particle source; a second charged particle optical system on which a charged particle beam from the first charged particle optical system is made incident; a movable detection unit which detects a charged particle beam emitted from the first charged particle optical system; and an adjustment unit which adjusts a relative position between the first charged particle optical system and the second charged particle optical system on the basis of output of the detection unit disposed between the first charged particle optical system and the second charged particle optical system.