| 发明名称 |
SIX-AXIS FOUR-SUBDIVIDING INTERFEROMETER |
| 摘要 |
Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting minors. |
| 申请公布号 |
US2014125989(A1) |
申请公布日期 |
2014.05.08 |
| 申请号 |
US201414152991 |
申请日期 |
2014.01.10 |
| 申请人 |
SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.;SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS, CHINESE ACADEMY OF SCIENCES |
发明人 |
CHEN JIANFANG;CHENG ZHAOGU;CHENG YA;HUANG HUIJIE;CHI FENG |
| 分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
