发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 Provided are a semiconductor device including an oscillator arid a manufacturing method thereof, in which cost is low and design flexibility is high. The semiconductor device includes a wiring structure region and an oscillator region. The semiconductor device also includes, in the oscillator region, a metal resistive element as the same layer as a conducting film over uppermost metal wiring in the wiring structure region.
申请公布号 US2014125421(A1) 申请公布日期 2014.05.08
申请号 US201314070949 申请日期 2013.11.04
申请人 RENESAS ELECTRONICS CORPORATION 发明人 MIYAZAKI TOSHIHIKO
分类号 H01L23/522;H01L21/768;H01L23/532 主分类号 H01L23/522
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