| 摘要 |
PROBLEM TO BE SOLVED: To provide a pellicle which can allow the width of a pellicle frame to be narrowed to the minimum to secure the largest exposed area, but cannot allow the pellicle frame to be deformed when the pellicle is produced or transported and the film of which is not wrinkled but can be stuck to a photomask with desired dimensional precision.SOLUTION: The pellicle frame has a double-layer structure of an inner frame and an outer frame. The inner frame stretches and holds the pellicle film and has a mask tacky-adhesive layer. The outer frame is stuck fast to the inner frame but can be separated from the inner frame. |
