SUBSTRATE MEMBER AND METHOD FOR MANUFACTURING CHIP

摘要

PROBLEM TO BE SOLVED: To improve the number of chips obtained from a substrate member and also improve a yield.SOLUTION: A substrate member W includes a substrate 1, and a plurality of chip regions 2 formed on the substrate via scribe lines 3. The plurality of chip regions each include a first region 2b in contact with the scribe lines and having a plurality of first pattern elements 5b formed therein, and a second region 2a surrounded by the first region and having a plurality of second pattern elements 5a formed therein. There is satisfied at least one of a relationship in which a minimum value of sizes of the first pattern elements is larger than a minimum value of sizes of the second pattern elements and a relationship in which a minimum value of intervals between the adjacent first pattern elements is larger than a minimum value of intervals between the adjacent second pattern elements.