发明名称 POWER DISTRIBUTOR FOR DEFINED SEQUENTIAL POWER DISTRIBUTION
摘要 The present invention relates to a power distributor that is capable of distributing the high power from a DC generator to more than two targets sequentially and without the power output of the DC generator being interrupted. Furthermore, the invention relates to a sputter source that comprises the power generator described above.
申请公布号 WO2014067650(A1) 申请公布日期 2014.05.08
申请号 WO2013EP03251 申请日期 2013.10.29
申请人 OERLIKON TRADING AG, TRÜBBACH 发明人 LENDI, DANIEL
分类号 H01J37/34;C23C14/34 主分类号 H01J37/34
代理机构 代理人
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