<p>This element analysis device has: a vacuum container; a pyroelectric crystal disposed inside the vacuum container; a temperature variation means for varying the temperature of the pyroelectric crystal; an insulator member for covering one polarized face of the pyroelectric crystal and having a dielectric constant that is less than that of the pyroelectric crystal; an electroconductive needle provided erectly to a polarized face of the pyroelectric crystal and having a protruding end that protrudes from the insulator member; a specimen stage disposed inside the vacuum container; and an X-ray detection means for detecting a characteristic X-ray emitted from a specimen mounted on the specimen stage. The specimen stage has a specimen mounting surface that is orthogonal to an extended line of the protruding end of the needle, and is electrically connected and grounded to the other polarized face of the pyroelectric crystal.</p>
