| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a digital variable capacitance MEMS device which is prevented from malfunction even under vibration or the like.SOLUTION: In a state where a MEMS bridge 3 is not displaced without application of a drive voltage, respective electrodes 21, 22, 33, 34 are arranged so that the electrostatic capacitance between from a first electrode 21 to a second electrode 22 depends on the total sum of a clearance g1 between the first electrode 21 and a third electrode 33, clearances g2, g3 between the third electrode 33 and a fourth electrode 34, and an electrode plate 41, and a clearance g4 between the second electrode 22 and the fourth electrode 34.</p> |
