| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope in which a transmission image and a diffraction pattern can be observed simultaneously.SOLUTION: In an electron microscope including an electron source, and a detector for detecting electrons transmitted through a sample when the sample is irradiated with an electron beam generated from the electron source, an annular first detector having position resolution is provided at a focus position where the electrons transmitting through the sample while diffracting are focused, a second detector for forming a transmission electron image by detecting the transmission electron beam passed through the center of the position detector is provided, an electron beam diffraction image of the sample is acquired by the first detector, and a transmission electron image of the sample is formed by the second detector. |
