INSPECTION DEVICE AND INSPECTION METHOD

摘要

Provided is technology to improve the detection precision of an inspection device. This inspection device (100) has an irradiating unit (101) that irradiates a surface of a sample with a beam by way of pulsed oscillations from a laser light source, a detector (102) that receives incident light from the sample surface generated by the irradiation and generates and outputs a detection signal, and a detection controller (104) that generates a gate signal (G) for controlling input and output for the detector (102) in timing with the pulsed oscillations of the irradiating unit (101) and applies the signal to the detector (102). The detector (102) receives the incident light at the timing according to the gate signal (G) and generates and outputs the detection signal.