STRUCTURE FOR SILICON NANOWIRE CHIP FOR BIOLOGICAL DETECTION AND MANUFACTURING METHOD THEREFOR

摘要

Provided are a structure for silicon nanowire chip for biological detection and a manufacturing method therefor. The structure comprises a semiconductor substrate (1), a silica barrier layer (2) grown on the semiconductor substrate (1), a polycrystalline silicon layer (3) grown on the silica barrier layer (2), and a structural layer grown on the polycrystalline silicon layer (3), wherein the polycrystalline silicon layer (3) includes a patterned silicon nanowire array (4), the structure of the structural layer includes, from bottom to top, a SiON layer (5), a TaN layer and/or a Ta2O5 layer (6), and the TaN layer and/or the Ta2O5 layer (6) covers only the surface of each of silicon nanowires in the silicon nanowire array (4). Therefore, in the present invention, the problem that the silicon nanowire array (SiNW) is susceptible to contamination in preservation and use is solved, and the biochip can resist diffusion contamination of Na, K, Fe, Cu and Ca ions and is not affected by various chemical effects such as pH, thereby achieving high stability in detection.