| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam device for acquiring each pixel of a scanning transmission image and for acquiring an electron diffraction pattern without loosing an electron beam.SOLUTION: An electron beam device 1 comprises: an electron source 11 for outputting an electron beam; an objective lens 16 for focusing the electron beam outputted from the electron source 11 on a sample; a scanning coil 14 disposed between the electron source 11 and the objective lens 16 and used for causing the electron beam to scan the surface of the sample; an image-forming lens 17 for adjusting the spread angle of the electron beam having transmitted the sample; a diffraction image detector 19 having a detection region in which to detect the electron beam and used for acquiring an electron diffraction image; and a detector 18 disposed between the image-forming lens 17, the sample and the diffraction image detector 19 and outside a region linking an emission position of the electron beam having transmitted the sample and an edge of the detection region, and used for detecting the strength of the electron beam. When detecting the strength of the electron beam by using the detector 18, the image-forming lens 17 expands the spread angle of the electron beam having transmitted the sample to be larger than when acquiring an electron diffraction image by using the diffraction image detector 19. |
