摘要 |
PROBLEM TO BE SOLVED: To shorten the inspection time and to reduce the number of inspection apparatus, by shooting a solar cell with one camera without performing split shooting, while making a dark room compact.SOLUTION: An inspection apparatus includes a conveyor 2 for carrying in and out a solar cell 1 as an inspected object, a near-infrared lens integrated line camera 3 for shooting the surface of a solar cell that is carried in by means of the conveyor, and a push bar 4 and a drive unit 5 as transfer means for transferring any one of the solar cell mounted on the conveyor and the near-infrared lens integrated line camera relatively. When shooting the solar cell by means of the near-infrared lens integrated line camera while moving any one of the solar cell mounted on the conveyor and the near-infrared lens integrated line camera relatively, the whole solar cell can be shot. |