发明名称 THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF AND DISPLAY DEVICE
摘要 Embodiments of the present invention provide a thin film transistor, a manufacturing method thereof and a display device. The method for manufacturing the thin film transistor, comprising the following steps: providing a substrate; forming a semiconductor layer on the substrate; forming a gate insulating layer; and forming a gate electrode, wherein the gate insulating layer comprises a first gate insulating layer, the first gate insulating layer being formed by oxidizing a portion of the semiconductor layer, and the unoxidized portion of the semiconductor layer forming an active layer, and wherein the gate electrode is formed in such a way that the gate insulating layer is sandwiched between the gate electrode and the active layer.
申请公布号 US2014124787(A1) 申请公布日期 2014.05.08
申请号 US201213703537 申请日期 2012.09.09
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 LI YANZHAO;WANG GANG;SUN LI;GUAN SHUANG
分类号 H01L21/02;H01L27/12;H01L29/66;H01L29/786 主分类号 H01L21/02
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