SUBSTRATE HOLDING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate holding device being capable of holding a substrate without deflection over the whole area and enabling simple and inexpensive production.SOLUTION: A substrate holding device 1 has toggle clamps 30 arranged along an edge P1 of a substrate and sandwiching the edge part P1 of the substrate to hold the substrate. The toggle clamps 30 are arranged opposing radially around the center P2 of the substrate P. At mutually opposite positions, the clamps hold the substrate P while drawing the substrate P in mutually opposite directions.