发明名称 METHOD OF MANUFACTURING RETAINER RING FOR POLISHING WAFER
摘要 Provided are a retainer ring for polishing a wafer and a method of manufacturing the retainer ring, in which an outer circumferential surface of the wafer is retained during an operation of polishing a wafer by using a chemical mechanical polishing (CMP) method. In detail, a retainer ring may be manufactured at relatively low costs. In addition, a method of manufacturing a retainer ring for polishing a wafer, which may be produced at relatively low costs, may be provided.
申请公布号 US2014123469(A1) 申请公布日期 2014.05.08
申请号 US201314070588 申请日期 2013.11.04
申请人 HAN SANG HYO 发明人 HAN SANG HYO
分类号 B24B37/32 主分类号 B24B37/32
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