发明名称 GRINDING DEVICE
摘要 PROBLEM TO BE SOLVED: To downsize a footprint of a grinding device.SOLUTION: A grinding device includes: a first processing region 40 including first holding means 9 which rotatably holds a workpiece W, first grinding means 12 which has a first spindle 16 rotationally driven and a first grinding wheel 20 attached to a tip part of the first spindle 16 and including a first grinding stone 24 facing the workpiece W held by the first holding means 9, and first moving means 38 which moves the first grinding means 12 in a direction that moves close to/away from the first holding means 9; a second processing region aligned with the first processing region 40 in a vertical direction and including second holding means 43 which holds a workpiece W, second grinding means 46 having a second spindle 50 where a second grinding wheel 54 including a second grinding stone 58 facing the workpiece W held by the second holding means 43 is attached to a tip part, and second moving means 70 which moves the second grinding means 46 in a direction that moves close to/away from the second holding means 43; and transfer means 77.
申请公布号 JP2014079859(A) 申请公布日期 2014.05.08
申请号 JP20120230047 申请日期 2012.10.17
申请人 DISCO ABRASIVE SYST LTD 发明人 GOTO TOSHIMITSU;KITANO MOTOKI;KIZAKI SEIKI;SAKURAI YOSHIHIRO;MATSUZAWA MINORU
分类号 B24B41/06;B24B7/00;H01L21/304 主分类号 B24B41/06
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