| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a radiation image detector of ISS type, which prevents a scintillator from being peeled easily from a photo-electric conversion panel.SOLUTION: In a photo-electric conversion panel 21, a plurality of TFTs 32 are formed on an insulation substrate 30. The plurality of TFTs 32 are covered with a first flattened film 37. A plurality of photo diodes (PD) 33 are formed on this first flattened film 37. The plurality of PDs 33 and the first flattened film 37 are covered with a second flattened film 39. A scintillator 20 contains cesium iodide and is directly vapor-deposited on the photo-electric conversion panel 21. On the second flattened film 39, the formation area of the scintillator 20 is inside the end portion 37a of the first flattened film 37 and the end portion 39a of the second flattened film 39, and outside the respective formation areas of the TFTs 32 and PDs 33.</p> |
