| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultra precise shape measurement device that realizes an ultra precise shape measurement of a nanometer-order workpiece at a practical level by a normal vector tracking type ultra precise shape measurement method.SOLUTION: The ultra precise shape measurement device comprises: a C1 shaft rotation device 20 that is arranged on a base movably in a Y-axis direction, arranged on a slide 18 having a control shaft Y-axis and causes a measured object to be rotated around a vertical shaft; a measured object rotation device 30 that is supported on the C1 shaft rotation device 20 at a level posture via a first bracket, has a control shaft A1 causing the measured object to be rotated around an X-axis and holds the measured object at a rotation center of an intersection of a rotation center line of a C1 shaft and a rotation center line of the A1 shaft; a C2 shaft rotation device 40 that is arranged in a cross beam frame 16, and causes a laser head to be rotated around the vertical shaft; and a laser head rotation device 48 that has a control shaft A2 causing the laser head to be rotated around the X-axis, and holds the laser head at a rotation center of an intersection of a rotation center line of a C2 shaft and a rotation center line of the A2 shaft. |
