JIG FOR DEPOSITING FILM ON GLASS ARTICLE

摘要

PROBLEM TO BE SOLVED: To establish a technique for reducing various bows that might occur to a glass article due to a difference of a size of the glass article or a CVD processing condition in depositing the transparent conductive film on the glass article by applying a thermal CVD method to the glass article under a heating condition.SOLUTION: A jig 50 for depositing a film on a glass article is used in chemical vapor deposition (CVD) by blowing raw material gas to a square plate-like glass article 1 under a heating condition. The jig comprises a location part 10 for locating the glass article 1, and pressurizing members 20 for pressurizing corners 1a of the glass article 1. The pressurizing member 20 is provided so that arrangement can be changed according to a size of the glass article 1.