WAVEFRONT OPTICAL MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a wavefront optical measuring device.SOLUTION: The wavefront optical measuring device for measuring a wavefront of light passing through an inspection optical element, includes: a light source; a lenslet array through which the light from the light source passes; a detector array configured to obtain a light intensity distribution via the lenslet array; and a processing unit. The processing unit performs data processing by using the obtained light intensity distribution. The data processing includes an estimation process in which a propagation model based on beamlets or a propagation model based on light beams is used as a front propagation model.