摘要 |
A semiconductor device including a semiconductor substrate of a first conductivity type and an epitaxial structure of the first conductivity type disposed thereon is disclosed. A well region of a second conductivity type is formed in the epitaxial structure and the semiconductor substrate. A drain region and a source region are respectively formed in the epitaxial structure inside and outside of the well region. At least one set of the first and second heavily doped regions is formed in the well region between the drain region and the source region, wherein the first and second heavily doped regions of the first and second conductivity type, respectively, are stacked vertically from bottom to top and have a doping concentration which is larger than that of the well region. A gate structure is disposed on the epitaxial structure. A method for fabricating a semiconductor device is also disclosed. |