MANUFACTUREING METHOD OF NANO POROSITY MATERIAL AND THE NANO POROSITY MATERIAL

摘要

A method for manufacturing nanoporous material according to an embodiment of the present invention comprises the steps of: a preparing step of preparing a substrate; and a manufacturing step of manufacturing the nanoporous material forming the network by nano clusters connected to each other by using plasma vapor deposition having 300 mTorr or more of the deposition pressure on the substrate. By using the manufacturing method, a nanoporous material, which forms a porous material having the pore distributed to the surface and inner part of the material by one deposition process, and has the intended surface energy without the need to form an additional coating layer, can be manufactured.