| 发明名称 |
COMPOSITION |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel composition capable of being used as an etching paste.SOLUTION: A composition contains the following compositions (A) and (B). (A) a boron trifluoride monoethylamine complex and (B) a 1-Butyl-3-methylimidazolium hexafluorophosphoric acid. |
| 申请公布号 |
JP2014082333(A) |
申请公布日期 |
2014.05.08 |
| 申请号 |
JP20120229280 |
申请日期 |
2012.10.16 |
| 申请人 |
HITACHI CHEMICAL CO LTD |
发明人 |
TSUKAHARA TOMOAKI;KAMISHIRO YASUSHI;NAKAKO TAKEO;NODO TAKAAKI;INADA MAKI;KURODA KYOKO |
| 分类号 |
H01L21/308;H01L21/306;H01L31/06 |
主分类号 |
H01L21/308 |
| 代理机构 |
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代理人 |
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| 主权项 |
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