In one embodiment, a MEMS sensor includes a mirror and an absorber spaced apart from the mirror, the absorber including a plurality of spaced apart conductive legs defining a tortuous path across an area directly above the mirror.
申请公布号
WO2014036250(A3)
申请公布日期
2014.05.08
申请号
WO2013US57280
申请日期
2013.08.29
申请人
ROBERT BOSCH GMBH;PURKLY, FABIAN;YAMA, GARY;FEYH, ANDO;O'BRIEN, GARY
发明人
PURKLY, FABIAN;YAMA, GARY;FEYH, ANDO;O'BRIEN, GARY